Maro Publications

Plasma Etching

From 06/23/2015 through 10/14/2014

Notes

Patent Abstracts

Patent Titles

 

Maro Encyclopedia

Home

 

Etching

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Patent Titles

For earlier Patent Titles, go to Sorted Patents /Decorating /Plasma Etching.

3/24/2015

8,986,558
Plasma etching method, plasma etching device, and method for producing photonic crystal

3/17/2015

8,980,049
Apparatus for supporting substrate and plasma etching apparatus having the same

8,980,048
Plasma etching apparatus

3/10/2015

8,975,191
Plasma etching method

8,975,190
Plasma processing method

8,975,188
Plasma etching method

2/10/2015

8,951,385
Plasma processing apparatus and plasma processing method

2/3/2015

8,945,411
Plasma processing apparatus and plasma processing method

12/16/2014

8,911,590
Integrated capacitive and inductive power sources for a plasma etching chamber

11/18/2014

8,889,024 
Plasma etching method 

10/14/2014

8,858,753 
Focus ring heating method, plasma etching apparatus, and plasma etching method 

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Patent Abstracts

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx 

Notes

xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx

Interested!!
Bookmark this page to follow future developments!.
(RDC 7/16/2012)

 xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx

Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

***********************************

Copyright 2013 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
**************************************