Maro Publications

Microfabrication

Notes

*3/8/2013 
from 3/8/2013

Maro Encyclopedia

Comments

Patent Abstracts

Patent Titles

Fabrication

Nanotechnology

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Notes

“Microfabrication is the term that describes processes of fabrication of miniature structures, of micrometre sizes and smaller.  Historically the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication".  In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.  Flat-panel displays and solar cells are also using similar techniques.

Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, material science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research.  The major concepts and principles of microfabrication are microlithography, doping, thin films, etching, bonding[disambiguation needed], and polishing.

(Microfabrication /Wikipedia, 3/8/2013)

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Interested!!
Bookmark this page to follow future developments!.
(RDC 6/5/2012)

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Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

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Copyright 2013 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
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* Date of latest addition; date of first entry is 3/8/2013.