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Plasma Coatings

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12/30/2014

8,920,888
Plasma process, film deposition method and system using rotary chuck

8,920,613
Offset magnet compensation for non-uniform plasma

8,920,611
Method for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning

8,920,600
Inductive plasma source with high coupling efficiency

8,920,599
High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity

8,920,598
Electrode and plasma processing apparatus

8,920,597
Symmetric VHF source for a plasma reactor

8,920,596
Plasma processing apparatus

12/23/2014

8,916,484
Remote plasma radical treatment of silicon oxide

8,916,056
Biasing system for a plasma processing apparatus

8,916,022
Plasma generator systems and methods of forming plasma

12/16/2014

8,911,602
Dual hexagonal shaped plasma source

8,911,588
Methods and apparatus for selectively modifying RF current paths in a plasma processing system

8,910,591
Apparatus and methods for capacitively coupled plasma vapor processing of semiconductor wafers

8,910,590
Plasma deposition

12/9/2014

8,906,471 
Method of depositing metallic film by plasma CVD and storage medium 

8,906,249 
Plasma processing apparatus and plasma processing method 

8,906,197 
Plasma processing chamber having electrodes for cleaning chamber 

8,906,196 
Plasma processing apparatus and method for controlling the same 

8,906,195 
Tuning hardware for plasma ashing apparatus and methods of use thereof 

8,906,163 
Methods and apparatus for integrating and controlling a plasma processing system 

8,904,957 
Plasma processor and plasma processing method 

8,904,956 
Plasma stamp, plasma treatment device, method for plasma treatment and method for producing a plasma stamp 

11/25/2014

8,893,651 
Plasma-arc vaporization chamber with wide bore 

11/11/2014

8,883,269 
Thin film deposition using microwave plasma 

8,883,256 
Process for the internal coating of hollow bodies using a plasma beam at atmospheric pressure 

11/04/2014

8,877,285 
Process for repairing a cylinder running surface by means of plasma spraying processes 

8,877,283 
Method for preparing porous hydroxyapatite coatings by suspension plasma spraying 

10/28/2014

8,871,312 
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber 

8,871,010 
Plasma spray method for the manufacture of an ion conductive membrane 

10/21/2014

8,865,264 
Plasma coatings and method of making the same 

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Patent Abstracts

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Notes

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Interested!!
Bookmark this page to follow future developments!.
(RDC 7/16/2012)

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Roger D. Corneliussen
Editor
www.maropolymeronline.com

Maro Polymer Links
Tel: 610 363 9920
Fax: 610 363 9921
E-Mail: cornelrd@bee.net  

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Copyright 2013 by Roger D. Corneliussen.
No part of this transmission is to be duplicated in any manner or forwarded by electronic mail without the express written permission of Roger D. Corneliussen
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